E / DK - Rotary Piston Vacuum Pumps

The E and DK pumps are mechanically acting vacuum pumps on the principle of a rotary piston or plunger. The pumps are manufactured as single and two-stage pumps. The E pumps are single-stage pumps with a pumping speed of 250 m3/h (147cfm) and an ultimate pressure of 0,04 mbar (0.024 Torr). The DK pumps are two-stage pumps with a pumping speed of 200 m3/h (118 cfm) and an ultimate pressure of 5•10-4 mbar (3•10-4 Torr).

 Technical applications

- Manufacture of semicondactors;

- Coating systems;

- Chemical industry;

- Metallurgy;

- Electrical engineering;