P/n DU0046
Typical application
- Vacuum coating in research and development
- Pre-production trials
- Special experiments

Advantages to the user:

- Modular system design
- УFreedom of installation and retrofitting of process components without problems
- For installation into clean-room walls
- Система откачки адаптирована для индивидуального использования
- High frequency sputtering possible

Pump system:
- Two stage rotary vane pump TRIVAC D 25 B
- Turbomolecular pump TURBOVAC 600 С