P/n  DU0047

Typical Applications:
- Vacuum coating in research and development
- Pre-production trials
- Special experiments

ПAdvantages to the user:

Modular system design
- Freedom of installation and retrofitting of process components without problems
- For installation into clean-room walls
- High frequency sputtering possible

Pump system:
- Two stage rotary vane vacuum pump TRIVAC D 25 B
- Turbomolecular pump TURBOVAC 600 С